Run-to-Run Control in Semiconductor Manufacturing  

 - Boca Raton:  CRC Press;  2001p. 
 - 348p. 
<br/><br/><label>ISBN: </label>9780849311789 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor Manufacturing 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / RUN