TY  - BOOK
ED  - Ed By Moyne, James, Castillo, Enrique Del and Hurwitz, Arnon Max
TI  - Run-to-Run Control in Semiconductor Manufacturing 
SN  - 9780849311789
U1  - 621.38152 
PY  - 2001///p
CY  - Boca Raton
PB  - CRC Press
KW  - Semiconductor Manufacturing
ER  -